مقاله Ge/SiGe Superlattices for Thermoelectric Devices Grown by Low-Energy Plasma-Enhanced Chemical Vapor Deposition : تی پی بین

خلاصه مقاله

Ge/SiGe multiple quantum wells are presented as efficient material for room-temperature thermoelectric generators monolithically integrated onto silicon. We have deposited and characterized 10-μm-thick heterostructures engineered for lateral devices, in which both heat and current flow parallel to the multilayer. In this paper we investigate in detail the structural and interface quality by means of x-ray diffraction and transmission electron microscopy. Thermoelectric measurements, giving a figure of merit of 0.04 to 0.08, together with mobility spectra and defect analysis suggest possibilities of even higher efficiency. Nevertheless, the high power factor of 2 mW/K²m to 6 mW/K²m is promising for applications.

نویسندگان

S. Cecchi [ L-NESS Politecnico di Milano, Polo Territoriale di Como, via Anzani 42, 22100, Como, Italy ]

T. Etzelstorfer [ Institute of Semiconductor and Solid State Physics, Johannes Kepler University, Altenbergerstrae 69, 4040, Linz, Austria ]

E. Müller [ Electron Microscopy ETH Zurich (EMEZ), Wolfgang-Pauli-Str. 16, 8093, Zurich, Switzerland ]

A. Samarelli [ School of Engineering, University of Glasgow, Rankine Building, Oakfield Avenue, Glasgow, G12 8LT, UK ]

L. Ferre Llin [ School of Engineering, University of Glasgow, Rankine Building, Oakfield Avenue, Glasgow, G12 8LT, UK ]

کلمات کلیدی

Silicon germanium multiple quantum well thermoelectrics

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Journal of Electronic Materials 2013

The Journal of Electronic Materials (JEM) reports monthly on the science and technology of electronic materials, while examining new applications for semiconductors, magnetic alloys, dielectrics, nanoscale materials, and photonic materials. The journal welcomes articles on methods for preparing and evaluating the chemical, physical, electronic, and optical properties of these materials. Specific areas of interest are materials for state-of-the-art transistors, nanotechnology, electronic packaging, detectors, emitters, metallization, superconductivity, and energy applications.

حوزه های تحت پوشش : nanotechnology, electronic packaging, detectors, emitters, metallization, superconductivity, and energy applications