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مجله کنترل فرآیند
جزئیات رویداد
همایش ، رویداد ، ژورنال
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  • a g&p ewma algorithm for high-mix semiconductor manufacturing processes

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    جزئیات بیشتر مقاله
    • تاریخ ارائه: 1392/01/01
    • تاریخ انتشار در تی پی بین: 1392/01/01
    • تعداد بازدید: 679
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    • شماره تماس دبیرخانه رویداد: -
     in mixed run processes, typical in semiconductor manufacturing and other automated assembly-line type process, products with different recipes will be produced on the same tool. product based run-to-run control can be applied to improve the process capability. the effect of product-based controller on low frequency products is, however, minimal, due to inability to track tool variations. in this work, we propose a group and product based ewma control scheme which combines adaptive k-means cluster method and run-to-run ewma control to improve the performance of low frequency products in the mixed run process. similar products could be classified into the same group adaptively and controlled by a group ewma controller. the group controller is updated by both low frequency products and similar high frequency products; so that low frequency products can be improved by shared information from similar large frequency products. however, the high frequency products are controlled by individual product-based ewma to avoid interference of the low frequency products. the advantages of proposed control scheme are demonstrated by benchmark simulation and reversed engineered industrial applications.

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